Semiconductor Robot Systems for Atmospheric and Vacuum Environments | | Sankyo is a pioneer in the development of robots for clean room automated manufacturing environments and is regarded as an expert in this field with its exceptional atmospheric and vacuum clean room robot technology.
Today, Sankyo is a world leader in clean room robotics with a product lineup covering a variety of wafer, cassette and reticle handling robots for atmospheric and vacuum environments as well as Clean Cassette Stockers and complete vacuum transfer chambers for cluster applications.
| |
|
