SR8220 / SR8230 Wafer Handler Series | | One of the World's Fastest 300 mm Wafer Handling Robot Series. Ultra clean Edge Grip End Effector achieves Superior Fast and Reliable Wafer Handling. | | - Lightning Fast with Maximum Throughput
- Precision High Speed Motion
- Excellent Straight Line Accuracy
- 50,000 Hours MTBF
- Super High Rigidity
- AC Servo Motors with Absolute Encoders
- Mechanical Edge Grip or Vacuum End Effectors
- Class 1 Cleanliness
- Uses SC5000 Series Controller
Variety of versions:
- Single Arm (SR8230) and
Dual Arm (SR8220) Versions - Track mounted versions
- Options: Flip Axis, Long Z-Axis,
Mapping Sensors, etc. - Customized Versions
| | | SR8220 Dual Arm |  | | SR8220 flip | SR8220 on Track Axis |
SR7163 — Dual Arm Robot System | - 5-Blade EE with variable pitch between
7.2mm and 12mm - Independent working second arm
- Long vertical stroke
(more than 1000mm possible)
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