SR824x Wafer Handler Series: 2,3, and 4 FOUPs Access
Unique 3-Link Robot Design enables access to 4 FOUPs without using linear track axis Your Benefits: - Small Installation Space - Wide Working Area
- High Speed - Maximum Throughput:
- Single Arm / Double Hand Type for Cycle Time Reduction
- Universal Hand Adapter - Easy Exchange / Use of:
- 200 / 300mm Edge-Grip End Effectors
- 200 / 300mm Vacuum End Effectors
- any End Effector combination
- Optional Flip-Axis (Supinator) on upper hand can reach any position between -10 and 280 degrees
| | SR8240 | | Small Installation Space - Wide Working Area:
Ability to serve up to 3 FOUPs without linear track axis | | SR8241 | | Small Installation Space - Wide Working Area:
Ability to serve up to 4 FOUPs without linear track axis |
| SR824X with flip axis option | | | Optional Flip-Axis (Supinator) on upper hand acn reach any position between -10 and 280 degrees |  | SR8242 | | Maximum Throughput: Multi Blade End Effector for Upper Hand - Up to 5 Wafers can be handled at the same time Maximum Flexibility: Independent working Lower Hand allows flexible Single Wafer Handling Edge-Grip and Vacuum End Effector versions available |  |
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