Solar (PV Thin Film) Robot Systems for Atmospheric and Vacuum Environments

Atmospheric Robot Systems:

• SR818x Series
  • Suitable for up to 1m² substrate size (for example
    600 x 1200 mm²)
  • Single and Dual Arm Configurations available
  • Standard Z-Stroke up 2400mm available
  • Standard Track Axis up 7200mm available

• SR819x Series
  • Suitable for up to 2m² substrate size (for example 1000x1500 mm)
  • Single and Dual Arm Configurations available
  • Standard Z-Stroke up 3000mm available
  • Standard Track Axis up 10.700mm available

• SRxxxx Series under development
  • Suitable for up to 6m² substrate size

Vacuum Robot Systems:

Sankyo's product lineup covers different kind of vacuum handling robots as well as complete vacuum transfer chambers for cluster applications. On request, customized versions are available.